Repairs & Maintenance Services

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Support focus on process boards, high precision power units, and advanced support tools such as precision chillers, vacuum pumps, and heat exchangers.

Our repair center is fully equipped to facilitate a wide range of board repairs, with available testing and calibration services. Our experienced technicians are capable of handling various brands and models to assess, repair and troubleshoot most faulty equipment.

We have successfully handled the following brand & equipment:

  • RF Generators, Power Supplies, Controllers, Drivers
  • Trumpf Huettinger, ENI, AE
  • Siemens, Omron, Meanwell
  • Muegge. AMAT, DNS

Past Works

Category

Root Cause Analysis & Repair of Recurrent Electrostatic Chuck Failures

Critical Ion Implanter Beamline Recovery After Power Surge Event

Rapid Response: Vacuum Leak Diagnosis & Repair in a High-Volume CVD Tool

Wafer Temperature Control System Optimization for Annealing Process

Gas Distribution System Retrofit to Reduce Particle Contamination

Process Chamber Upgrade for Enhanced PVD Sputtering Uniformity

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