Our precision chemical cleaning activities allow process parts to retain cleanliness and quality after being subjected to continuous diffusion, chemical deposition and other semiconductor production processes. We can provide the services to parts made of quartz ceramic and DPS metal.
Our process is streamlined and organized into the following steps:
1. Incoming Inspection – To pinpoint contaminations
2. Mechanical Cleaning – To remove organic matter on process parts
3. Chemical Cleaning – To remove excess material and matter via chemical usage
4. Heat Treatment – To remove excess chemicals & liquids via outgassing within specialized chambers
5. Inspection & Packaging – QAQC and label tracking in cleanroom before it is ready to be returned
The cleaning facility is equipped with reliable mechanical arc spray robots, automated chemical chambers, drying ovens, supported with DI water systems and waste management.
Our Precision Cleaning Services cater to and are not limited to the following parts:
– Focus Ring
– Capture Ring
– Ceramic Domes
– Upper Chamber DPS Metal
– DPS Aperture Ceramic
– Ceramic Aperture Plate
– Mesh Chains
– Carbon Fibre Solar Trays
Items sent to cleaning are guaranteed to have an extended part life-time, which reduces wafer production reject rates hence increasing production yield.